Editor(s):
Prof. Dr. Osamu Tabata, Prof. Toshiyuki Tsuchiya
First published:12 December 2007
Print ISBN:9783527314942 |Online ISBN:9783527622139 |DOI:10.1002/9783527622139
Copyright © 2008 Wiley‐VCH Verlag GmbH & Co. KGaA
Book Series:Advanced Micro and Nanosystems
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS. Show less
Free Access
CHAPTER 1
Prof. Toshiyuki Tsuchiya
CHAPTER 2
Mototsugu Sakai
CHAPTER 3
Oliver Paul, Joao Gaspar
CHAPTER 4
Takahiro Namazu
CHAPTER 5
Harold Kahn
CHAPTER 6
Fumihiko Sato, Hideaki Watanabe, Sho Sasaki
CHAPTER 7
Osamu Torayashiki, Kenji Komaki
CHAPTER 8
Noriyuki Yasuike
CHAPTER 9
Keiji Isamoto, Changho Chong, Hiroshi Toshiyoshi
CHAPTER 10
Yuzuru Ueda, Akira Yamazaki
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