Editor(s):
Dr. Tamara Bechtold MSc, PhD,, Dr. Gabriele Schrag, Dr. Lihong Feng PhD,
First published:6 February 2013
Print ISBN:9783527319039 |Online ISBN:9783527647132 |DOI:10.1002/9783527647132
Copyright © 2013 Wiley‐VCH Verlag GmbH & Co. KGaA
Book Series:Advanced Micro and Nanosystems
System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies.
The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs.
This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor
industry, physicists, and physical chemists. Show less
Free Access
CHAPTER 1
Gary K. Fedder, Tamal Mukherjee
CHAPTER 2
Dr. Gabriele Schrag, Gerhard Wachutka
CHAPTER 3
Dr. Lihong Feng PhD, Peter Benner, Jan G. Korvink
CHAPTER 4
Peter Schneider, Christoph Clauß, Ulrich Donath, Günter Elst, Olaf Enge-Rosenblatt, Thomas Uhle
CHAPTER 5
Ren-Gang Li, Qing-An Huang
CHAPTER 6
Jing Song, Qing-An Huang
CHAPTER 7
Martin Niessner, Dr. Gabriele Schrag
CHAPTER 8
Jacopo Iannacci
CHAPTER 9
Dr. Tamara Bechtold MSc, PhD, Dennis Hohlfeld, Evgenii B. Rudnyi, Jan G. Korvink
CHAPTER 10
Amit Hochman, Dmitry M. Vasilyev, Michał J. Rewieński, Jacob K. White
CHAPTER 11
Jan Lienemann, Emanuele Bertarelli, Andreas Greiner, Jan G. Korvink
CHAPTER 12
Jan Mehner
CHAPTER 13
Dennis Hohlfeld, Dr. Tamara Bechtold MSc, PhD, Evgenii B. Rudnyi, Bert Op het Veld, Rob van Schaijk
CHAPTER 14
Laura Del Tin, Evgenii B. Rudnyi, Jan G. Korvink
CHAPTER 15
François Pêcheux, Marie-Minerve Louërat, Karsten Einwich
CHAPTER 16
Michael Kraft
CHAPTER 17
Gunar Lorenz, Gerold Schröpfer
CHAPTER 18
Evgenii B. Rudnyi
CHAPTER 19
Jason V. Clark
CHAPTER 20
Sandeep Akkaraju
CHAPTER 21
Sebastien Cases, Mary-Ann Maher
CHAPTER 22
Peter J. Gilgunn, Jason V. Clark, Narayan Aluru, Tamal Mukherjee, Gary K. Fedder
Free Access
