Atomic Layer Deposition of Nanostructured Materials
Editor(s): Prof. Dr. Nicola Pinna Dr. Mato Knez
First published:2 January 2012
Print ISBN:9783527327973 |Online ISBN:9783527639915 |DOI:10.1002/9783527639915
Copyright © 2012 Wiley‐VCH Verlag GmbH & Co. KGaA